CAS 175923-04-3| TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM
Molecular Formula: C12H32N4Zr
Molecular Weight: 323.63
Purity: 97% Min.
Package: 100 g / 1 kg / 25 kg
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Specification of CAS 175923-04-3 | TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM
ITEMS |
SPECIFICATION |
color |
light yellow |
Fp |
50 °F |
form |
liquid |
density |
1.049 g/mL at 25 °C(lit.) |
Boiling point |
81 °C0.1 mm Hg(lit.) |
Related Articles of CAS 175923-04-3 | TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM
PEALD of zirconium oxide using tetrakis (ethylmethylamino) zirconium and oxygen
SJ Yun, JW Lim, JH Lee - Electrochemical and solid-state letters, 2004 - iopscience.iop.org
Novel thermally-stable hafnium and zirconium ALD precursors
A Pinchart, N Blasco, C Lachaud… - 2007 IEEE/SEMI …, 2007 - ieeexplore.ieee.org
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